Characterization of thin nitrided oxide layers using high spatial resolution transmission electron energy loss spectrometry
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OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Semiconductor materials and devices · Advanced Electron Microscopy Techniques and Applications
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References (5)
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4. Joy · Ultramicroscopy · 1980 · 5 · 33310.1016/0304-3991(80)90037-6 ↗
5. Barla · J. Appl. Phys. · 1990 · 68 · 363510.1063/1.346326 ↗