Structural and optical properties of nitrided silicon oxide layers rapid thermally grown in a pure N2O ambient
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Semiconductor materials and devices · GaN-based semiconductor devices and materials · Thin-Film Transistor Technologies
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (19)
Show source-provided references
1. Hwang · IEEE IEDM Tech. Dig. · 1990 · 421
2. Uchiyama · IEEE IEDM Tech. Dig. · 1990 · 425
3. Fukuda · IEEE Trans. Electron Dev. · 1992 · 39 · 12710.1109/16.108221 ↗
4. Okada · Appl. Phys. Lett. · 1992 · 61 · 316310.1063/1.107946 ↗
5. Hori · IEEE Trans. Electron Dev. · 1992 · 39 · 13410.1109/16.108222 ↗
6. Okada · IEEE Trans. Electron Dev. · 1994 · 41 · 19110.1109/16.277380 ↗
7. Kuiper · Appl. Phys. Lett. · 1992 · 61 · 103110.1063/1.107706 ↗
8. Carr · Appl. Phys. Lett. · 1993 · 63 · 5410.1063/1.109749 ↗
9. Lange · J. Electrochem. Soc. · 1994 · 141 · 25910.1149/1.2054695 ↗
10. Kalnitsky · J. Electrochem. Soc. · 1990 · 137 · 23410.1149/1.2086373 ↗
11. Aspnes · Phys. Rev. · 1983 · B27 · 98510.1103/PhysRevB.27.985 ↗
12. Azzam · 1977
13. 1985
14. Moslehi · IEEE Trans. Electron Dev. ED-32 · 1985 · 10610.1109/T-ED.1985.21920 ↗
15. Irene · Thin Solid Films · 1993 · 233 · 9610.1016/0040-6090(93)90069-2 ↗
16. Rossow · 1993
17. Rossow · Surf. Sci. · 1993 · 287&288 · 71810.1016/0039-6028(93)91060-3 ↗
18. Kelly · Surf. Sci. · 1993 · 285 · 28210.1016/0039-6028(93)90440-U ↗
19. Müller · Thin Solid Films · 1993 · 233 · 1910.1016/0040-6090(93)90053-R ↗