Improvement of surface morphology and bulk structure of a-SiC:H films
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Semiconductor materials and devices · ZnO doping and properties
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References (7)
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6. Baker · Philos. Mag. · 1990 · B62 · 21310.1080/13642819008226987 ↗
7. Mazor · Phys. Rev. Lett. · 1988 · 60 · 42410.1103/PhysRevLett.60.424 ↗