Photosensitive a-Si:H devices fabricated by DC magnetron reactive sputtering
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence · Transition Metal Oxide Nanomaterials
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References (5)
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1. Moustakas · 1983 · 56
2. Anderson · Thin Solid Films · 1982 · 93 · 30110.1016/0040-6090(82)90136-5 ↗
3. Arimoto · J. Appl. Phys. · 1985 · 57 · 477810.1063/1.335343 ↗
4. White · 1976 · 7
5. Berkovskaya · 1968 · vol. 20 · 3