Determination of local structure using X-ray emission spectroscopy: hydrogenated a-SiN and a-SiO
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Ion-surface interactions and analysis · X-ray Spectroscopy and Fluorescence Analysis
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References (6)
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1. Wiech · Phys. Rev. · 1993 · B47 · 698110.1103/PhysRevB.47.6981 ↗
2. Wiech · Phys. Rev. · 1994 · B49 · 539810.1103/PhysRevB.49.5398 ↗
3. Guraya · Phys. Rev. · 1990 · B42 · 567710.1103/PhysRevB.42.5677 ↗
4. Hasegawa · Phys. Rev. · 1992 · B46 · 12748
5. Bell · Phys. Rev. · 1988 · B37 · 838310.1103/PhysRevB.37.8383 ↗
6. Robertson · Philos. Mag. · 1991 · B63 · 4710.1080/01418639108224430 ↗