A novel plasma jet for GeHx-radical generation and a-Ge:H-film deposition
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Abstract
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OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence · Semiconductor materials and devices
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References (8)
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6. Hirschfelder · 1964
7. Ruscic · J. Chem. Phys. · 1990 · 92 · 186510.1063/1.458587 ↗
8. Kushner · J. Appl. Phys. · 1988 · 63 · 253210.1063/1.340989 ↗