Physics and chemistry of deposition
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Silicon and Solar Cell Technologies · Ion-surface interactions and analysis
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References (11)
Show source-provided references
1. Tanaka · Materials Science Reports · 1987 · vol. 210.1016/S0920-2307(87)80003-8 ↗
2. Street · Phys. Rev. Lett. · 1982 · 49 · 118710.1103/PhysRevLett.49.1187 ↗
3. J. Kakalios and R.A. Street, this conference.
4. ZE. Smith and S.Wagner, this conference.
5. A.Matsuda and K.Tanaka, this conference.
6. G.Lucovsky and D.V. Tsu, this conference.
7. J.Perrin, this conference.
8. I.Shimizu, this conference.
9. Gallagher · 1986 · 70 · 3
10. R.W.Collins and J.M.Cavese, this conference.
11. R.W.Collins and J.M.Cavese, this conference.