Analysis of local structure in amorphous SiNx:H alloy films in terms of x-ray emission spectroscopy
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OpenAlex topics: Thin-Film Transistor Technologies · X-ray Spectroscopy and Fluorescence Analysis · Ion-surface interactions and analysis
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References (8)
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8. Wiech · Phys. Rev. · 1993 · B47 · 698110.1103/PhysRevB.47.6981 ↗