Changing of density of states in amorphous silicon nitride at degradation of its electric propertoes using soft X-ray spectroscopy
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Semiconductor materials and devices · Silicon Nanostructures and Photoluminescence
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References (5)
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1. Robertson · Appl. Phys. Lett. · 1984 · 44 · 41510.1063/1.94794 ↗
2. Agafonov · Trudy of Physical Institute · 1987 · 184 · 55
3. Terekhov · Izv. AN SSSR ser. Fiz. · 1985 · 49 · 1531
4. Brytov · FTT · 1984 · 26 · 1685
5. Carson · Phys. Rev. · 1986 · 33B · 243210.1103/PhysRevB.33.2432 ↗