The application of ERD and RBS techniques for determining h depth profiles and impurity contents in a-Si:H layers
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OpenAlex topics: Thin-Film Transistor Technologies · Silicon and Solar Cell Technologies · Integrated Circuits and Semiconductor Failure Analysis
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References (6)
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1. l'Ecuyer · J. Appl. Phys. · 1976 · 47 · 881
2. Zentai · Thin Solid Film · 1984 · 116 · 25110.1016/0040-6090(84)90444-9 ↗
3. Zentai · J. Non-Cryst. Sol. · 1985 · 77&78 · 22510.1016/0022-3093(85)90644-1 ↗
4. Chu · 1978
5. Pászti · Nucl. Instr. and Meth. · 1986 · B15 · 48610.1016/0168-583X(86)90348-4 ↗
6. Ziegler · 1977 · Vols. 3–4