Equivalent circuit model for large-area ac magnetron sputtering of dielectrics
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Abstract
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Research context
OpenAlex topics: Metal and Thin Film Mechanics · Semiconductor materials and devices · Acoustic Wave Resonator Technologies
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References (5)
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1. Chapin · 1979
2. McKelvey · 1982
3. R. Hill, F. Jansen, these Proceedings, p. 35.
4. Chapman · 1980
5. Sieck · 1994 · 233