journal article·1993-12

Hydrogenated amorphous silicon films prepared from trisilane by windowless hydrogen discharge lamp

Akira Yoshida, Shinji Ikeda, Hiroshi Tsuchimoto

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Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

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Research context

OpenAlex topics: Thin-Film Transistor Technologies · GaN-based semiconductor devices and materials · ZnO doping and properties

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References (9)

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9. Powell · J. Appl. Phys. · 1993 · 73 · 18910.1063/1.353882 ↗