Electronic and optical effects of boron doping by plasma assisted diffusion in a-SiC : H
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Research context
OpenAlex topics: Silicon Carbide Semiconductor Technologies · Thin-Film Transistor Technologies · Copper Interconnects and Reliability
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References (9)
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5. Beyer · J. Non-Cryst. Solids · 1985 · 77/78 · 85710.1016/0022-3093(85)90795-1 ↗
6. Schubert · 1986 · 489
7. Mohring · 1986 · 70 · 331
8. W. Haubold, Univ. Stuttgart-Hohenheim, Inst. Inorg. Chem., priv. comm.
9. M.B. Schubert et al., to be publ.