Annealing effects of low pressure mercury and excimer laser light on degraded a-Si:H TFTs
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Silicon and Solar Cell Technologies
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References (6)
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5. Dutta · Appl. Phys. Lett. · 1990 · 57 · 1127
6. Shur · J. Appl. Phys. · 1984 · 55 · 383110.1063/1.332893 ↗