Properties and electron field emission of highly resistive and transparent polymer-like a-C:H

The properties of polymer-like hydrogenated amorphous carbon films prepared by plasma enhanced chemical vapor deposition (PECVD) from CH 4 or C 2 H 6 diluted in H 2 are discussed. The application of the polymer-like a-C:H for the electron field emitter is also demonstrated. The electrical resistivity of the samples is >3.1 x 10 13 Ω cm. The hydrogen density in the sample increases, the refractive index decreases and the optical gap increases with increasing gas ratio of CH 4 or C 2 H 6 . The electron field emission from polymer-like a-C:H after dielectric breakdown is observed. Its threshold electric field is ∼18 V/μm. The polymer-like a-C:H might be applicable to an electron field emitter.