journal article·1986-06

Properties of magnetron sputtered hydrogenated amorphous and microcrystalline silicon films alloyed with germanium

N. Saito, T. Terada, T. Yamaguchi

Journal of Non-Crystalline Solids· Volume 83· Issue 1-2
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Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

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Research context

OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence · Silicon and Solar Cell Technologies

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References (20)

Show source-provided references
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