journal article·1993-12

Optical detection and dynamics of surface transient processes in plasma CVD of hydrogenated amorphous silicon

A. Takano, N. Naito, M. Kawasaki, H. Koinuma

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Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

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Research context

OpenAlex topics: Thin-Film Transistor Technologies · Silicon and Solar Cell Technologies · Surface Roughness and Optical Measurements

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References (8)

Show source-provided references
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4. Kobayashi · Jpn. J. Appl. Phys. · 1990 · 29 · L70210.1143/JJAP.29.L702 ↗
5. Chang · Phys. Rev. B · 1990 · 41 · 1200210.1103/PhysRevB.41.12002 ↗
6. Takano · J. Appl. Phys. · 1993 · 73 · 798710.1063/1.353912 ↗
7. Computer-Aided Techniques for the Design of Multilayer Filters
8. Kawasaki · Phys. Rev. B. · 1989 · 39 · 1331610.1103/PhysRevB.39.13316 ↗