journal article·1987-12

Evaluation of the density of states at a-Si/SiNx/Cr capacitors by means of the quasi-static slow ramp CV-method

M. Böhm, S. Salamon, Z. Kiss

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Abstract

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Research context

OpenAlex topics: Thin-Film Transistor Technologies · Semiconductor materials and interfaces · Semiconductor materials and devices

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References (6)

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1. Thompson · J. Vac. Sci. Technol. B · 1984 · Vol. 2 · 82710.1116/1.582902 ↗
2. M. Böhm, S. Salamon, Z. Kiss, “Amorphous Silicon Logic Integrated Circuits”, submitted to Appl. Phys. A.
3. Kuhn · Solid-St. Electron. · 1970 · Vol. 13 · 87310.1016/0038-1101(70)90073-0 ↗
4. Böhm · 1987
5. Mego · Rev. Sci. Instrum. · 1986 · Vol. 57 · 279810.1063/1.1139046 ↗
6. Berglund · IEEE Trans. Electron. Dev. · 1966 · Vol. ED-13 · 70110.1109/T-ED.1966.15827 ↗