MCVD preform central dip reduction by collapse under fluorinated atmosphere
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Abstract
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Research context
OpenAlex topics: Copper Interconnects and Reliability · Thin-Film Transistor Technologies · Advancements in Photolithography Techniques
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References (7)
Show source-provided references
1. Mac Chesney · 1974
2. Payne · Electronics Letters · 1974 · 10–15
3. Marcuse · Bell Laboratories Record · 1980
4. Kawana · Review of the Electrical Communication Laboratories · 1980 · vol. 26
5. Matsumura · Applied Optics · 1980 · vol. 1910.1364/AO.19.003151 ↗
6. Akamatsu · Applied Physics Letters · 1977 · vol. 31
7. Liegois · 1981