Ar+ laser crystallization of a-Si:H film for active layer of TFT
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Laser Material Processing Techniques · Surface Roughness and Optical Measurements
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References (5)
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1. Amorphous silicon thin film and its applications to large-area electronics
2. Material properties controlling the performance of amorphous silicon thin film transistor
3. Laser crystallization of a-Si:H on insulator
4. Bao · Nuclear Instruments and Methods in Physics Research · 1989 · B37/38 · 391
5. Fritzsch · Phys. Rev. · 1983 · B28 · 490010.1103/PhysRevB.28.4900 ↗