Formation of microcrystalline structure in a-Si:H films prepared by RF sputtering
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Transition Metal Oxide Nanomaterials · Silicon Nanostructures and Photoluminescence
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References (4)
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1. Imura · Solid State Commun. · 1981 · 40 · 16110.1016/0038-1098(81)90158-7 ↗
2. Ishida · Jpn. J. Appl. Phys. · 1983 · 22 · L 7310.1143/JJAP.22.L73 ↗
3. Noda · Jpn. J. Appl. Phys. · 1982 · 21 · L 19510.1143/JJAP.21.L195 ↗
4. Lucovsky · Phys. Rev. B · 1979 · 19 · 206410.1103/PhysRevB.19.2064 ↗