Transmission electron microscopy of a-Si:H/a-SiNx:H multilayers

journal article·1985-12

Ruguang Cheng, Shulin Wen, Jingwei Feng, H. Fritzsche

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Abstract

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OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence · Photonic Crystals and Applications

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1. Abeles · J. Non-Cryst. Solids · 1984 · 66 · 35110.1016/0022-3093(84)90343-0 ↗

2. Cheng · Appl. Phys. Lett. · 1985 · 46 · 59210.1063/1.95550 ↗

3. Reimer · Phys. Rev. B · 1981 · 23 · 256710.1103/PhysRevB.23.2567 ↗

4. Fritzsche · Thin Solid Films · 1982 · 90 · 11910.1016/0040-6090(82)90631-9 ↗

5. Ross · J. Non-Cryst. Solids · 1984 · 66 · 8110.1016/0022-3093(84)90302-8 ↗

6. L. Ley, M. Hundhausen, private communication.

7. Stutzmann · Appl. Phys. Lett. · 1985 · 41 · 2110.1063/1.96415 ↗