Microstructure development during the thermal oxidation of silicon in chlorine containing ambients
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Abstract
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Research context
OpenAlex topics: Silicon and Solar Cell Technologies · Silicon Nanostructures and Photoluminescence · Semiconductor materials and devices
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References (9)
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1. Monkowski · Sol. St. Tech. · 1979 · 58
2. Monkowski · Sol. St. Tech. · 1979 · 113
3. Monkowski · J. Electrochem. Soc. · 1979 · 126 · 112910.1149/1.2129231 ↗
4. Monkowski · 1980 · 61
5. Rapp · 1976 · 1
6. Monkowski · J. Electrochem. Soc. · 1978 · 125 · 186710.1149/1.2131312 ↗
7. Monkowski · 1981 · 361
8. Tsong · 1980 · 321
9. Rohatgi · J. Electrochem. Soc. · 1979 · 126 · 14310.1149/1.2128971 ↗