The formation and stability of sub-micron clusters in silane and argon plasmas
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OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence · Silicon and Solar Cell Technologies
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References (6)
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2. Oana · J. Non-Cryst. Solids · 1989 · 115 · 2710.1016/0022-3093(89)90350-5 ↗
3. Hundhausen · Phys. Rev. Lett. · 1984 · 53 · 159810.1103/PhysRevLett.53.1598 ↗
4. Hirose · 1984 · Vol.21a · 9
5. Street · Phys. Rev. · 1988 · B38 · 560310.1103/PhysRevB.38.5603 ↗
6. Turner · J. Appl. Phys. · 1990 · 67 · 743010.1063/1.344533 ↗