Amorphous diamond-like carbon films: Effect of deposition rate on optical and mechanical properties
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Abstract
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Research context
OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · Advanced Surface Polishing Techniques
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References (6)
Show source-provided references
1. 1982
2. Mackowski · Le Vide · 1981 · 212 · 99
3. Touzé · Le Vide · 1984 · 223 · 323
4. Wemple · Phys. Rev. · 1971 · B3 · 133810.1103/PhysRevB.3.1338 ↗
5. Stoney · 1909 · A-82 · 172
6. Ferraton · Thin Solid Films · 1981 · 78 · 20710.1016/0040-6090(89)90585-3 ↗