A new deposition mode in plasma-enhanced cryogenic CVD
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OpenAlex topics: Thin-Film Transistor Technologies · Silicon and Solar Cell Technologies · Silicon Nanostructures and Photoluminescence
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References (9)
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2. Miyazaki · 1990 · 17
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6. Pollard · Phys. Rev. B · 1982 · 26 · 317210.1103/PhysRevB.26.3172 ↗
7. Takeda · Phys. Rev. B · 1984 · 30 · 587110.1103/PhysRevB.30.5871 ↗
8. Furukawa · Phys. Rev. B · 1985 · 31 · 211410.1103/PhysRevB.31.2114 ↗
9. Tsai · J. Appl. Phys. · 1986 · 59 · 299810.1063/1.336920 ↗