Microstructure of nitrogen-rich a-SixNyHz films
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Abstract
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Research context
OpenAlex topics: Semiconductor materials and devices · Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence
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References (7)
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1. Tsu · Phys. Rev. · 1986 · B33 · 706910.1103/PhysRevB.33.7069 ↗
2. Z. Yin and F. W. Smith, “Tetrahedron Model for the Optical Dielectric Function of a-SixNyHz Alloys” (to be published).
3. Z. Yin and F. W. Smith, “Optical Constants and Infrared Absorption of a-SixNyHz Films: Comparisons with Predictions of the Tetrahedron Model” (to be published).
4. Philipp · J. Electrochem. Soc. · 1973 · 120 · 29510.1149/1.2403440 ↗
5. Aspnes · J. Appl. Phys. · 1979 · 50 · 492810.1063/1.325596 ↗
6. Mui · Phys. Rev. · 1987 · B35 · 808010.1103/PhysRevB.35.8080 ↗
7. Mui · Phys. Rev. · 1988 · B38 · 1062310.1103/PhysRevB.38.10623 ↗