Properties of tantalum pentoxide (Ta2O5) obtained by plasma assisted deposition using a TaF5 source
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OpenAlex topics: Semiconductor materials and devices · Electronic and Structural Properties of Oxides · Catalytic Processes in Materials Science
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References (4)
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3. Aoyama · J. Electrochem. Soc. · 1996 · 143 · 97710.1149/1.1836568 ↗
4. Kamiyama · J. Electrochem. Soc. · 1993 · 140 · 161710.1149/1.2221612 ↗