journal article·1991

Atomic microstructure and electronic properties of a-SiNx:H deposited by PECVD

Keiji Maeda, Ikurou Umezu

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Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

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Research context

OpenAlex topics: Thin-Film Transistor Technologies · ZnO doping and properties · Silicon Nanostructures and Photoluminescence

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References (12)

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