Mass-transfer analysis of a:Si:H deposition by the glow discharge process
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Abstract
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Research context
OpenAlex topics: Ion-surface interactions and analysis · Thin-Film Transistor Technologies · Plasma Diagnostics and Applications
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References (7)
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1. Rand · J. Vac. Sci. Technol. · 1979 · 16 · 42010.1116/1.569965 ↗
2. Spear · 1981 · 42 · 1143
3. Shimizu · 1981 · 42 · 1123
4. Mort · Photogr. Sci. Eng. · 1980 · 24 · 241
5. Yamamato · 1981 · 42 · 495
6. Turban · Thin Solid Films · 1979 · 60 · 14710.1016/0040-6090(79)90185-8 ↗
7. Chen · Thin Solid Films · 1983 · 101 · 4110.1016/0040-6090(83)90491-1 ↗