A PDS study of hydrogenated amorphous silicon films deposited by RF glow-discharge from silane-hydrogen mixtures

journal article·1987-12

R.C. Van Oort, M.J. Geerts, J.C. Van Den Heuvel, J.S. Payson

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Abstract

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OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence · Silicon and Solar Cell Technologies

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Show source-provided references

1. Knights · Appl. Phys. Lett. · 1981 · 38 · 33110.1063/1.92359 ↗

2. Vanier · J. Appl. Phys. · 1984 · 56 · 181210.1063/1.334191 ↗

3. van Oort · 1986 · 480

4. Cody · 1984 · vol. 21 B

5. Tsai · J. Appl. Phys. · 1986 · 59 · 299810.1063/1.336920 ↗

6. Weakliem · 1984 · vol. 21 A