Role of ions in formation of amorphous Si:H network in electron cyclotron resonance plasma chemical vapor deposition
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence · Silicon and Solar Cell Technologies
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (5)
Show source-provided references
1. Nakayama · Appl. Phys. Lett. · 1990 · 57 · 229710.1063/1.103892 ↗
2. Matsuoka · Appl. Phys. Lett. · 1987 · 50 · 186410.1063/1.97719 ↗
3. Matsuo · Jpn. J. Appl. Phys. · 1983 · 22 · L21010.1143/JJAP.22.L210 ↗
4. Hitsuishi · 1990 · 273
5. Chen · 1991 · 19