Doping of microcrystalline Si:H,Cl films in R.F. glow discharge
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence · Ion-surface interactions and analysis
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References (12)
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11. V.Augelli, R.Murri, N.Alba and T.Ligonzo, Hall mobility in doped and undoped amorphous Si:H,Cl films, this volume.
12. Spear · Phylos. Mag. · 1976 · 33 · 93510.1080/14786437608221926 ↗