journal article·1993-12Open access

Influence of higher deposition temperature on a-Si:H material properties, powder formation and light-induced degradation, using the VHF (70 MHz) glow discharge technique

U. Kroll, J. Meier, M. Goetz, A. Howling, J.-L. Dorier, J. Dutta, A. Shah, Ch. Hollenstein

Abstract

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Research context

OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence · Silicon and Solar Cell Technologies

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References (14)

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