Low temperature deposition of amorphous silicon oxide and silicon nitride films
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Abstract
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Research context
OpenAlex topics: Semiconductor materials and devices · Silicon Nanostructures and Photoluminescence · Thin-Film Transistor Technologies
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References (7)
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1. Adams · Solid State Technol. · 1983 · 26 · 135
2. Lucovsky · J. Vac. Sci. Tech B · 1985 · 3 · 112210.1116/1.583066 ↗
3. Richard · J. Vac. Sci. Tech. A · 1985 · 3 · 86710.1116/1.573334 ↗
4. Longeway · J. Phys. Chem. · 1984 · 88 · 7310.1021/j150645a018 ↗
5. S.S. Chao et al., these proceedings.
6. D.V. Tsu, G. Lucovsky and M. Mantini, Phys. Rev. (in press).
7. R.J. Markunas, unpublished results