Influence of the deposition parameters on the bonding and optical properties of SiNx ECR films
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Copper Interconnects and Reliability · Thin-Film Transistor Technologies · Semiconductor materials and devices
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (12)
Show source-provided references
1. Ghandhi · 1994
2. Hirao · Jpn. J. Appl. Phys. · 1988 · 27 · 3010.1143/JJAP.27.30 ↗
3. Ghanbari · J. Vac. Sci. Technol. · 1989 · A7 · 91810.1116/1.575821 ↗
4. Samukawa · J. Vac. Sci. Technol. · 1991 · A9 · 8510.1116/1.577135 ↗
5. Hernandez-Rojas · Appl. Optics · 1992 · 31 · 160610.1364/AO.31.001606 ↗
6. Garcia · Vacuum · 1994 · 45 · 102710.1016/0042-207X(94)90013-2 ↗
7. Robertson · Philos. Mag. · 1994 · B69 · 30710.1080/01418639408240111 ↗
8. Stewart · Philos. Mag. · 1988 · B57 · 43110.1080/13642818808208515 ↗
9. Tsu · J. Vac. Sci. Technol. · 1986 · A4 · 481
10. Hasegawa · Appl. Phys. Lett. · 1991 · 58 · 74110.1063/1.104533 ↗
11. Popov · J. Vac. Sci. Technol. · 1992 · A10 · 305510.1116/1.577864 ↗
12. Manabe · J. Appl. Phys. · 1989 · 66 · 247510.1063/1.344258 ↗