Fabrication of high-quality poly-Si thin films combined with in situ real-time spectroscopic ellipsometry
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Semiconductor materials and devices · Silicon Nanostructures and Photoluminescence
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References (7)
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1. Serikawa · IEEE Trans. Electron Devices ED-36 · 1989 · 192910.1109/16.34272 ↗
2. 22nd IEEE PVSC
3. Akasaka · Jpn. J. Appl. Phys. · 1993 · 32 · 260710.1143/JJAP.32.2607 ↗
4. Akasaka · Appl. Phys. Lett. · 1995 · 66 · 344110.1063/1.113381 ↗
5. Drevillon · Appl. Phys. Lett. · 1987 · 50 · 165110.1063/1.97757 ↗
6. Collins · J. Appl. Phys. · 1985 · 57 · 456610.1063/1.335361 ↗
7. T. Akasaka and I. Shimizu, to be submitted.