High-rate deposition of photosensitive a-SiC:H using a carbon source of C2H2
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Silicon Carbide Semiconductor Technologies · Semiconductor materials and devices
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References (3)
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1. Kudoh · 1986
2. Fukada · 1982 · 500
3. Fukada · 1983 · Vol. 6 · 149