Deposition and characterization of amorphous and micro-crystalline Si,C alloy thin films by a remote plasma-enhanced chemical-vapor deposition process - RPECVD
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OpenAlex topics: Thin-Film Transistor Technologies · Ion-surface interactions and analysis · Diamond and Carbon-based Materials Research
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References (8)
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5. Wang · J. Vac. Sci. Technol · 1991 · A9 · 44410.1116/1.577430 ↗
6. Wang · 1990 · 204
7. Lucovsky · 1991 · 219
8. Wang · 1991 · 219