Si K-emission bands of nitrogen rich a-SiNx:H
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OpenAlex topics: Ion-surface interactions and analysis · Semiconductor materials and devices · Electron and X-Ray Spectroscopy Techniques
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References (4)
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1. Zahorowski · J. Non-Cryst. Solids · 1987 · 97 & 98 · 84310.1016/0022-3093(87)90202-X ↗
2. Kärcher · Phys. Rev. · 1984 · B30 · 189610.1103/PhysRevB.30.1896 ↗
3. Papaconstantopoulos · Phys. Rev. · 1983 · B27 · 256910.1103/PhysRevB.27.2569 ↗
4. Griscom · J. Non-Cryst. Solids · 1977 · 24 · 15510.1016/0022-3093(77)90046-1 ↗