Activated reactive evaporation of hydrogenated amorphous silicon
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Research context
OpenAlex topics: Diamond and Carbon-based Materials Research · Semiconductor materials and devices · Silicon Nanostructures and Photoluminescence
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References (5)
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1. Spear · J. Non-Cryst. Solids · 1972 · 8–10 · 72710.1016/0022-3093(72)90220-7 ↗
2. R.F. Bunshan, U.S. Patent No. 3791852
3. Anderson · U.K. Patent No. 8325495 · 1984
4. Staebler · Appl. Phys. Lett. · 1977 · 31 · 29210.1063/1.89674 ↗
5. Spear · Phil. Mag. · 1976 · 33 · 93510.1080/14786437608221926 ↗