Properties of a-Si : H : F deposited in SiF4/SiH4/Ar Gas mixtures by a glow-discharge technique
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence · Silicon and Solar Cell Technologies
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References (7)
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5. Brodsky · Phys. Rev. · 1977 · B16 · 355610.1103/PhysRevB.16.3556 ↗
6. Staebler · Appl. Phys. Lett. · 1977 · 31 · 29210.1063/1.89674 ↗
7. Lucovsky · Solid St. Commun. · 1979 · 29 · 57110.1016/0038-1098(79)90666-5 ↗