The location, evolution, and role of fluorine in glow discharge a-Si:F
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Ga2O3 and related materials · Semiconductor materials and devices
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References (4)
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1. Matsumura · 1982 · 88
2. Weil · J. de Phys. Suppl. · 1981 · 10 · C4
3. Moser · Thin Solid Films · 1982 · 90 · 16110.1016/0040-6090(82)90636-8 ↗
4. Janai · Solid-State Comm. · 1983