Engineering of plasma deposition systems used for producing large area a-Si:H devices
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Silicon and Solar Cell Technologies · Silicon Nanostructures and Photoluminescence
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References (4)
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1. Schmitt · 1991
2. Martins · J. of Non-Cryst. Sol. · 1987 · 97&98 · 139910.1016/0022-3093(87)90335-8 ↗
3. Martins · 1983 · 778
4. Hughes · 1967