Stability of a-Si:H deposited at high temperatures and hydrogen dilution in a remote hydrogen plasma reactor
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Abstract
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence · Silicon and Solar Cell Technologies
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References (11)
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10. A. H. Mahan and M. Vanecek, Proceedings of the International Meeting on Stability of Amorphous Silicon Materials and Solar Cells, AIP Proceedings Series, in press.
11. Ready · 1990 · 192 · 127