Influence of oxygen and deposition conditions on sputtered a-Si

journal article·1980-01

Tatsuo Shimizu, Minoru Kumeda, Ichiro Watanabe, Kiyohide Kamono

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Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

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OpenAlex topics: Thin-Film Transistor Technologies · Semiconductor materials and interfaces · Phase-change materials and chalcogenides

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Show source-provided references

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7. Ohgawara · Kagaku no Ryoiki extra no. 45 · 1961 · 127