journal article·1985-02

Field effect in dc-sputtered a-Si:H in structure using SiNx prepared in situ

V. Šmíd, N.M. Dung, L. Štourač, K. Jurek

Journal of Non-Crystalline Solids· Volume 70· Issue 1
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Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

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Research context

OpenAlex topics: Thin-Film Transistor Technologies · Semiconductor materials and devices · Silicon Nanostructures and Photoluminescence

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References (20)

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