The effects of Ar and He dilution of silane plasmas on the microstructure of a-Si:H detected by small-angle X-ray scattering

journal article·1993-12

S.J. Jones, Y. Chen, D.L. Williamson, U. Kroll, P. Roca i Cabarrocas

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Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

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OpenAlex topics: Thin-Film Transistor Technologies · Silicon and Solar Cell Technologies · Silicon Nanostructures and Photoluminescence

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Show source-provided references

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3. Williamson · Appl. Phys. Lett. · 1989 · 55 · 78310.1063/1.101779 ↗

4. Kroll · 1992 · 258 · 135

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10. Jones · 1993

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12. Guha · Appl. Phys. Lett. · 1992 · 61 · 144410.1063/1.107564 ↗