Hydrogen dilution effects on properties of ECR plasma deposited a-Ge:H
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OpenAlex topics: Thin-Film Transistor Technologies · Photonic and Optical Devices · Semiconductor Lasers and Optical Devices
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References (7)
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5. Drevillon · Appl. Phys. Lett. · 1983 · 42 · 80110.1063/1.94100 ↗
6. Sputtering
7. Matsuda · Jpn. J. Appl. Phys. · 1986 · 25 · L5410.1143/JJAP.25.L54 ↗