Growth of hydrogenated amorphous silicon carbide films from hydrocarbon gas of methane series mixed with silane and their properties
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Research context
OpenAlex topics: Thin-Film Transistor Technologies · ZnO doping and properties · Diamond and Carbon-based Materials Research
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References (3)
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1. A. Hatano and S. Nitta, to be submitted.
2. Anderson · Phil. Mag. · 1976 · 35 · 110.1080/14786437708235967 ↗
3. Nitta · Solar Energy Materials · 1982 · 8 · 24910.1016/0165-1633(82)90067-3 ↗